The
authors report on recent advances in the development of mid-,
long-, and very long-wavelength infrared (MWIR, LWIR, and VLWIR) type-II
InAs/GaSb superlattice infrared photodiodes. The residual carrier background of binary
type-II InAs/GaSb superlattice photodiodes of cut-off wavelengths around 5 µm
has been studied in the temperature range between 10 and
200 K. A four-point, capacitance-voltage technique on mid-wavelength and long-wavelength
type-II InAs/GaSb superlattice infrared photodiodes reveal residual background concentrations around
5 × 10
14 cm
-3. Additionally, recent progress towards LWIR photodiodes
for focal plane array imaging applications is presented. Single element
detectors with a cut-off wavelength,
c,50%, of 10.2 µm demonstrated
detectivities of approximately 1 × 10
11 cmHz
1/2W
-1 and quantum efficiencies
of 32% at the peak responsivity wavelength of around 7.9
µm. Furthermore, high-performance VLWIR single element photodiodes are discussed. The
silicon dioxide passivation of VLWIR photodiodes is also presented, which
resulted in an approximately 5 times increase of the sidewall
resistivity. The latest developments in this material system lend further
support for its use as a high-performance alternative for infrared
optical systems compared to the current state-of-the-art imaging systems, especially
those approaching the long-wavelength and very-long-wavelength infrared.
©2006
COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.