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Opt. Eng. / Volume 45 / Issue 10 / Optical System Design

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Near-field solid immersion lens microscope with advanced compact mechanical design

Opt. Eng., Vol. 45, 103002 (2006); doi:10.1117/1.2361276

Published 30 October 2006

ABSTRACT

REFERENCES (8)

CITING ARTICLES

Tao Chen, member spie; Tom Milster, fellow spie; Sang-Ki Park, Brendan McCarthy, and Dror Sarid
University of Arizona, College of Optical Sciences, Tucson, Arizona 85721

Christian Poweleit and Jose Menendez
Arizona State University, Department of Physics and Astronomy, Tempe, Arizona 85287

A compact mechanical package is developed for a standardmicroscope that implements a solid immersion lens (SIL) on aretractable bimorph swing arm. With the compact package mounted onan inverted microscope, far-field and near-field images are obtained atthe same location by moving the SIL with the swingarm. With white-light incoherent illumination, the resolution of this systemfor observing digital versatile discs is around 200 nm with aneffective numerical aperture of 1.5. Imaging with the SIL iscompared with an atomic force microscopy scan.

©2006 Society of Photo-Optical Instrumentation Engineers

History:	Received 3 November 2005; revised 7 March 2006; accepted 22 March 2006; published 30 October 2006
DOI Link:	http://dx.doi.org/10.1117/1.2361276