Optical, mechanical and thermal properties of MgF2-ZnS and MgF2-Ta2O5 composite thin films deposited by coevaporation
We deposit composite MgF2-ZnS and MgF2-Ta2O5 thin films by coevaporation, and explore their optical, mechanical and thermal properties. The refractive indices of pure MgF2, Ta2O5 and ZnS films are 1.3...
Lei Xu, Jianmin Miao, and Anand Asundi Micro Machines Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798
Digitalholography for micromeasurement is an active research topic. With respectto the requirement of realizing characterization of micro-scale structures inmicroelectromechanical systems with high resolution and accuracy, in-line configuration isstudied in this paper as the fundamental structure of adigital holography system. A mathematical model based on Fourier opticsis developed to analyze the digital recording mechanism and propertiesof the system in comparison with those of the commonlyused off-axis arrangement. Theoretical analysis and experimental results demonstrate thatin-line configuration is advantageous in enhancing the system performance. Besidesthe relaxed requirement of spatial resolution on the CCD sensorsand the greater flexibility of the system, higher lateral resolutionand lower speckle noise can be achieved.
07.60.Ly Instruments, apparatus, components, and techniques common to several branches of physics and astronomyOptical instruments, equipment, and techniquesInterferometers
42.40.Kw OpticsHolographyHolographic interferometry; other holographic techniques
42.30.Ms OpticsImaging and optical processingSpeckle and moire patterns
07.10.Cm Instruments, apparatus, components, and techniques common to several branches of physics and astronomyMechanical instruments, equipment, and techniquesMicromechanical devices and systems
06.20.Dk Metrology, measurements, and laboratory proceduresMetrologyMeasurement and error theory
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