Design and numerical analysis of a joule-heating-induced continuous-flow polymerase chain reaction microchip
We reports a detailed study on a novel design of a Joule-heating-induced polymerase chain reaction (PCR) microchip directly heated by applying electric current to the ends of the geometric varied micr...
Electrowetting movement of an aqueous droplet between two three-dimensional electrode surfaces
In an effort to develop a novel electronic paper image display technology based on the electrowetting principle, a 3-D electrowetting cell is designed and fabricated, which consists of two 3-D bent el...
Integrated microgiant electrorheological fluid valves for microflow cytometry
J. Micro/Nanolith. MEMS MOEMS, Vol. 8, 021103 (2009);
doi:10.1117/1.3124191
Published 5 May 2009
ABSTRACT
REFERENCES (16)
Yun-Yang Ling and Yechi Zhang Hong Kong University of Science and Technology, Department of Mechanical Engineering, Clear Water Bay, Hong Kong
Weijia Wen Hong Kong University of Science and Technology, Department of Physics, Clear Water Bay, Hong Kong
Patrick Tabeling École Supérieure de Physique et de Chimie Industrielle, Microfluidic MEMS and Nanostructures Laboratory, 10 rue Vauqueline, Paris, 75231, France
Yi-Kuen Lee Hong Kong University of Science and Technology, Department of Mechanical Engineering, Clear Water Bay, Hong Kong
Wepresent the fabrication and optimization of new integrated microgiant electrorheological(GER) valves for microflow cytometry. Compared to previous GER valves,new GER valves, consisting of an SU-8 layer, a PDMSmembrane, and glass layers, were fabricated by 4-mask microelectromechanical systemstechnology and two new packaging methods. This design enabled goodbonding and fluidic interconnection. The thickness of the PDMS membranewas designed such that the membrane deformation was large enoughthat the cytometry channel was well sealed. The interfacial stressbetween the PDMS and the PDMS/SU-8 as a function ofvacuum plasma treatment time was investigated in detail. The switchingbehavior of the GER valves was also analyzed and characterizedusing fluorescence microscopy.
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