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FRONT MATTER

Front Matter: Volume 7159
Proceedings of SPIE
Proc. SPIE Vol. 7159, 715901 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (392 kB)  ]  (12 pages)

SESSION 1

Design and studies of a quadrupolar dielectrophoresis chip integrated with detection electrode
Yonghong Liu, Zhan Zhao, Jing Xu, Cheng Pang, Zhen Fang, and Lidong Du
Proc. SPIE Vol. 7159, 715902 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (393 kB)  ]  (5 pages)

Photo system based on scanning electron microscope for IC chip inspection
Wei Liu, Jin Shen, and Boxue Tan
Proc. SPIE Vol. 7159, 715903 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (978 kB)  ]  (11 pages)

The study of image inpainting for infrared imaging system based on micro-cantilever FPA
Cheng Gong, Mei Hui, Liquan Dong, Xiaohua Liu, and Yuejin Zhao
Proc. SPIE Vol. 7159, 715904 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (526 kB)  ]  (7 pages)

Optimization of a novel structure for micromachined resonant pressure sensor
Xiaojing Shi, Deyong Chen, Junbo Wang, and Zhengwei Wu
Proc. SPIE Vol. 7159, 715905 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (412 kB)  ]  (8 pages)

SESSION 2

A single cell penetration system by ultrasonic driving
Zhaoying Zhou, Mingfei Xiao, Xing Yang, and Ting Wu
Proc. SPIE Vol. 7159, 715907 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (853 kB)  ]  (8 pages)

A micro hemoglobin-A1c immunosensor based on FET and electrochemical growth of gold nanoparticles
Lan Qu, Chao Bian, Jizhou Sun, Jinghong Han, and Shanhong Xia
Proc. SPIE Vol. 7159, 715908 (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (407 kB)  ]  (7 pages)

Micro amperometric immunosensor for the detection of salmonella typhimurium
Jizhou Sun, Shanhong Xia, Chao Bian, and Lan Qu
Proc. SPIE Vol. 7159, 71590A (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (741 kB)  ]  (6 pages)

SESSION 3

A novel resonant pressure sensor with boron diffused silicon resonator
Junbo Wang, Xiaojing Shi, Lei Liu, Zhengwei Wu, Deyong Chen, Jinmin Zhao, and Shourong Li
Proc. SPIE Vol. 7159, 71590C (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (665 kB)  ]  (8 pages)

The design and analysis of a robust micro-machined vibrating ring gyroscope
Li Chen, Deyong Chen, and Junbo Wang
Proc. SPIE Vol. 7159, 71590D (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (316 kB)  ]  (9 pages)

Studies on dielectrophoretic separation using biochips with different electrode shapes
Yonghong Liu, Zhan Zhao, Jing Xu, Cheng Pang, Zhen Fang, and Lidong Du
Proc. SPIE Vol. 7159, 71590E (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (442 kB)  ]  (4 pages)

Fast matching location algorithm based on mixed moment for wire bonding
Fan zhi Kong, Xing zhou Zhang, Yi zhong Wang, Da wei Zhang, and Jun lan LI
Proc. SPIE Vol. 7159, 71590F (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (278 kB)  ]  (9 pages)

POSTER SESSION

Design of a self-adaptive fuzzy PID controller for piezoelectric ceramics micro-displacement system
Shuang Zhang, Yuning Zhong, and Zhongbao Xu
Proc. SPIE Vol. 7159, 71590G (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (267 kB)  ]  (9 pages)

Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer
Ming-wei Yang and Zhao-ying Zhou
Proc. SPIE Vol. 7159, 71590H (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (246 kB)  ]  (5 pages)

Finite element analysis of the RF MEMS switch
Fu Zhao, Ping Wang, Yanjue Gong, Liang Lv, and Zhang Lei
Proc. SPIE Vol. 7159, 71590I (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (505 kB)  ]  (8 pages)

Characteristic analysis and study of an active matrix addressing for grating light modulator
Zhu Jin, Shanglian Huang, Zhihai Zhang, Ning Wang, Wei Wei, and Jie Zhang
Proc. SPIE Vol. 7159, 71590J (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (835 kB)  ]  (9 pages)

High aspect ratio grating fabrication in SU-8 resist by UV-Curing nanoimprint
Xudi Wang, Liangjin Ge, Jingjing Lu, and Shaojun Fu
Proc. SPIE Vol. 7159, 71590K (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (1205 kB)  ]  (5 pages)

The effective image denoising method for MEMS based IR image arrays
Liquan Dong, Xiaohua Liu, Yuejin Zhao, Ming Liu, Mei Hui, and Xiaoxiao Zhou
Proc. SPIE Vol. 7159, 71590L (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (1014 kB)  ]  (9 pages)

Experimental study of roof filling rate during thermal bonding of polymer microchannel sealing
Xudi Wang, Jingjing Lu, Yun Jiang, Liangjin Ge, and Shaojun Fu
Proc. SPIE Vol. 7159, 71590M (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (532 kB)  ]  (6 pages)

Analysis of a Hadamard transform near-infrared spectrometer based on grating light modulator
Wei Wei, Shanglian Huang, Yong Zhu, Ning Wang, Jie Zhang, and Zhu Jin
Proc. SPIE Vol. 7159, 71590N (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (696 kB)  ]  (8 pages)

Design of the subwavelength dual-layer metallic nanowire-grid polarizer
Yun Zhou, Yan Ye, Su Shen, Donglin Pu, and Linsen Chen
Proc. SPIE Vol. 7159, 71590O (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (279 kB)  ]  (9 pages)

Study on clamped-clamped beam in-plane capacitive resonators
Yingxia Jin, Yaquan Tang, and Xiaomei Yu
Proc. SPIE Vol. 7159, 71590P (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (447 kB)  ]  (8 pages)

Fabrication of 1-dimension nano-material-based device and its electrical characteristics
Xing Yang, Zhaoying Zhou, Fuzhong Zheng, and Min Zhang
Proc. SPIE Vol. 7159, 71590Q (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (321 kB)  ]  (7 pages)

Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices
Liwei Li, Rong Zhu, Zhaoying Zhou, and Jianxing Ren
Proc. SPIE Vol. 7159, 71590S (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (279 kB)  ]  (5 pages)

Experiment on microstructure fabrication with UV-LIGA technology
Xiaohu Zheng
Proc. SPIE Vol. 7159, 71590X (Feb. 2, 2009)
Abstract     Full Text:  [  PDF (177 kB)  ]  (5 pages)