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EDITORIAL

How does a reviewer make a difference?
Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 030101 (Sep. 29, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (44 kB)  ]

JM3 LETTERS

Impact of mask three-dimensional effects on resist-model calibration
Peter De Bisschop, Thomas Muelders, Ulrich Klostermann, Thomas Schmöller, John J. Biafore, Stewart A. Robertson, and Mark Smith
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 030501 (Jul. 1, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (380 kB)  ]

SPECIAL SECTION ON RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS AND MOEMS

Guest Editorial: Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS
Rajeshuni Ramesham and Allyson L. Hartzell
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031301 (Sep. 16, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (24 kB)  ]

Far-field diffraction analysis of submillimeter-thick bars for edge quality assessment
Sarun Sumriddetchkajorn and Kosom Chaitavon
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031302 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (533 kB)  ]

Radiation sensitivity of microelectromechanical system devices
Herbert R. Shea
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031303 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (171 kB)  ]

Simulation and analysis of electromagnetic in-plane microgenerator
C. T. Pan, Y. J. Chen, and S. C. Shen
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031304 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (999 kB)  ]

Electrical breakdown at low pressure for planar microelectromechanical systems with 10-  to  500-µm gaps
Patrick Carazzetti and Herbert R. Shea
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031305 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (771 kB)  ]

Wireless surface acoustic wave chemical sensor for simultaneous measurement of CO₂ and humidity
Wen Wang, Chunbae Lim, Keekeun Lee, and Sangsik Yang
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031306 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (421 kB)  ]

Review of vacuum packaging and maintenance of MEMS and the use of getters therein
Rajeshuni Ramesham and Richard C. Kullberg
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031307 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (569 kB)  ]

4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
Steven A. Cornelissen, Paul A. Bierden, Thomas G. Bifano, and Charlie V. Lam
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031308 (Jul. 29, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (1223 kB)  ]

Extraction of residual stress and dimensions from electrical measurements on surface micromachined test structures
Somashekara Bhat and Enakshi Bhattacharya
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031309 (Jul. 10, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (283 kB)  ]

SPECIAL SECTION ON COMPUTATIONAL LITHOGRAPHY

Guest Editorial: Computational Lithography
Donis Flagello and Chris Mack
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031401 (Sep. 18, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (25 kB)  ]

Fast simulation methods and modeling for extreme ultraviolet masks with buried defects
Chris H. Clifford and Andrew R. Neureuther
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031402 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (486 kB)  ]

Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method
Ke Zong, Xuan Zeng, Xia Ji, and Wei Cai
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031403 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (558 kB)  ]

Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems
Johannes Ruoff and Michael Totzeck
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031404 (Aug. 5, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (2179 kB)  ]

On the uniqueness of optical images and solutions of inverse lithographical problems
Yuri Granik
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031405 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (515 kB)  ]

Aerial image back propagation with two-dimensional transmission cross coefficient
Kenji Yamazoe, Yoshiyuki Sekine, and Tokuyuki Honda
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031406 (Aug. 25, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (646 kB)  ]

Optimal approximation of transfer cross coefficient for system transmission based on tensorial signal methods
Romuald Sabatier, Caroline Fossati, Salah Bourennane, and Antonio Di Giacomo
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 031407 (Aug. 28, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (686 kB)  ]

ARTICLES

Stochastic modeling in lithography: use of dynamical scaling in photoresist development
Chris A. Mack
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033001 (Jul. 2, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (182 kB)  ]

Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows
Kevin Lucas, Christopher Cork, Alexander Miloslavsky, Gerard Luk-Pat, Levi Barnes, John Hapli, John Lewellen, Greg Rollins, Vincent Wiaux, and Staf Verhaegen
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033002 (Jul. 7, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (2135 kB)  ]

Sensitivity of scanning electron microscope width measurements to model assumptions
John S. Villarrubia and Zejun J. Ding
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033003 (Aug. 17, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (581 kB)  ]

Soft stamp ultraviolet-nanoimprint lithography for fabrication of laser diodes
Jukka Viheriälä, Milla-Riina Viljanen, Juha Kontio, Tomi Leinonen, Juha Tommila, Mihail Dumitrescu, Tapio Niemi, and Markus Pessa
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033004 (Aug. 6, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (745 kB)  ]

Calibration of physical resist models: methods, usability, and predictive power
Ulrich Klostermann, Thomas Mülders, Denis Ponomarenco, Thomas Schmöller, Jeroen Van de Kerkhove, and Peter De Bisschop
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033005 (Sep. 18, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (921 kB)  ]

Fluid-photoresist interactions and imaging in high-index immersion lithography
Hoang V. Tran, Eric Hendrickx, Frieda Van Roey, Geert Vandenberghe, and Roger H. French
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033006 (Sep. 23, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (631 kB)  ]

Hotspot management and its applications in ultralow k₁ lithography
Kohji Hashimoto, Satoshi Usui, Shigeki Nojima, Toshiya Kotani, Eiji Yamanaka, Satoshi Tanaka, and Soichi Inoue
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033007 (Sep. 21, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (603 kB)  ]

Application results of lot-to-lot high-order and per-shot overlay correction for sub-60-nm memory device fabrication
Jangho Shin, Sangmo Nam, Taekyu Kim, Yong-Kug Bae, and Junghyeon Lee
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033008 (Aug. 21, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (389 kB)  ]

Patterning of multilayer dielectric optical filters using metal masks fabricated by electroforming and photolithography
Cheng-Chung Jaing, Chii-Rong Yang, Chun-Ming Chang, Chao-Te Lee, and Chien-Nan Hsiao
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033009 (Sep. 10, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (462 kB)  ]

Demonstration of fabricating a needle array by the combination of x-ray grayscale mask with the lithografie, galvanoformung, abformung process
Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, and Ryutaro Maeda
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033010 (Jul. 1, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (1166 kB)  ]

Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process
Mohamad Hajj-Hassan, Vamsy Chodavarapu, and Sam Musallam
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033011 (Jul. 23, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (551 kB)  ]

Large-size P-type silicon microchannel plates prepared by photoelectrochemical etching
Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin, Lianwei Wang, and Paul K. Chu
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033012 (Jul. 1, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (1068 kB)  ]

Obstacles to the production of protein microarray cassettes
Jean Montagu, Herman DeWeerd, Nathan Tyburczy, Natalia Rodionova, and Peter Maimonis
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033013 (Jul. 16, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (343 kB)  ]

Mechanical characterization and insertion performance of hollow microneedle array for cell surgery
Takahiro Kawashima, Takahiro Sakai, Norihisa Kato, Takayuki Shibata, Mitsuyoshi Nomura, Takashi Mineta, and Eiji Makino
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033014 (Sep. 15, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (457 kB)  ]

Electromechanical behavior of the curled cantilever beam
Wan-Chun Chuang, Yuh-Chung Hu, Chi-Yuan Lee, Wen-Pin Shih, and Pei-Zen Chang
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033020 (Jul. 13, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (266 kB)  ]

Design, fabrication, and characterization of out-of-plane W-form microsprings for vertical comb electrodes capacitive sensor
Chieh-Tang Chuang and Rongshun Chen
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033021 (Jul. 23, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (942 kB)  ]

Effect of residual stress on nanoindented property of Si/C/Si multilayers
Bo-Hsiung Wu, Chen-Kuei Chung, Ting-Ruen Shih, Cheng-Chang Peng, and Udit-Surya Mohanty
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033030 (Jul. 14, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (383 kB)  ]

Interferometric adaptive optics for high-power laser pointing and wavefront control and phasing
Kevin L. Baker, Eddy A. Stappaerts, Doug C. Homoelle, Mark A. Henesian, Erlan S. Bliss, Craig W. Siders, and Chris P. J. Barty
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033040 (Jul. 9, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (1698 kB)  ]

Improved solid-state planar Ti/Pd/Ag/AgCl/KCl-gel microreference electrode by silicon cap sealing package
I-Yu Huang, Shih-Han Wang, Chi-Chih Chu, and Chien-Tai Chiu
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033050 (Aug. 7, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (521 kB)  ]

Analyses of whispering-gallery modes in small resonators
Haiyong Quan and Zhixiong Guo
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033060 (Aug. 28, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (493 kB)  ]

Critical study of high-sensitivity pressure sensors with silicon/porous silicon composite membranes
L. Sujatha, Vishwas S. Kale, and Enakshi Bhattacharya
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033070 (Sep. 3, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (1153 kB)  ]

Novel optical sensor based on morphology-dependent resonances for measuring thermal deformation in microelectromechanical systems devices
Anisur Rahman, Reginald Eze, and Sunil Kumar
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 033071 (Sep. 9, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (145 kB)  ]

COMMUNICATIONS

Electric and magnetic field effects on the magnetostrictive thin film for MEMS
Heung-Shik Lee, Chongdu Cho, Dae-Seok Shin, and Sung Pil Chang
J. Micro/Nanolith. MEMS MOEMS Vol. 8, 039701 (Aug. 7, 2009)
Abstract     Full Text:  [ HTML Sectioned HTML    PDF (580 kB)  ]