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  Home » Journals » J. Micro/Nanolith. MEMS MOEMS »  Volume 8  » October - December 2009, Issue 4
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Each article is designated by a unique six-digit article number. When citing these articles, the article number should be used instead of a page number; for example, J. Micro/Nanolith. MEMS MOEMS 8, 040901 (2009).

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Journal of Micro/Nanolithography, MEMS and MOEMS

October - December 2009, Volume 8, Issue 4, Articles ( 04xxxx )

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SPECIAL SECTION ON EXTREME-ULTRAVIOLET LITHOGRAPHY

ARTICLES